Al2O3/SiO2 films prepared by electron-beam evaporation as UV antireflection coatings on 4H-SiC

Published 2007 View Full Article

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Title
Al2O3/SiO2 films prepared by electron-beam evaporation as UV antireflection coatings on 4H-SiC
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 254, Issue 10, Pages 3045-3048
Publisher
Elsevier BV
Online
2007-12-04
DOI
10.1016/j.apsusc.2007.10.052

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