Synthesis of molybdenum silicide by both ion implantation and ion beam assisted deposition

Title
Synthesis of molybdenum silicide by both ion implantation and ion beam assisted deposition
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 254, Issue 9, Pages 2678-2684
Publisher
Elsevier BV
Online
2007-11-27
DOI
10.1016/j.apsusc.2007.10.017

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