Influences of annealing temperature on the optical properties of SiOx thin film prepared by reactive magnetron sputtering

Published 2008 View Full Article

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Title
Influences of annealing temperature on the optical properties of SiOx thin film prepared by reactive magnetron sputtering
Authors
Keywords
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Journal
APPLIED SURFACE SCIENCE
Volume 255, Issue 5, Pages 2006-2011
Publisher
Elsevier BV
Online
2008-07-03
DOI
10.1016/j.apsusc.2008.06.141

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