Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks

Title
Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 105, Issue 21, Pages 211101
Publisher
AIP Publishing
Online
2014-11-25
DOI
10.1063/1.4902562

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