4.6 Article

Selective epitaxial growth of monolithically integrated GaN-based light emitting diodes with AlGaN/GaN driving transistors

Journal

APPLIED PHYSICS LETTERS
Volume 104, Issue 9, Pages -

Publisher

AMER INST PHYSICS
DOI: 10.1063/1.4867235

Keywords

-

Funding

  1. Research Grants Council (RGC) theme-based research scheme (TRS) of the Hong Kong Special Administrative Government [T23-612/12-R]

Ask authors/readers for more resources

In this Letter, we report selective epitaxial growth of monolithically integrated GaN-based light emitting diodes (LEDs) with AlGaN/GaN high-electron-mobility transistor (HEMT) drivers. A comparison of two integration schemes, selective epitaxial removal (SER), and selective epitaxial growth (SEG) was made. We found the SER resulted in serious degradation of the underlying LEDs in a HEMT-on-LED structure due to damage of the p-GaN surface. The problem was circumvented using the SEG that avoided plasma etching and minimized device degradation. The integrated HEMT-LEDs by SEG exhibited comparable characteristics as unintegrated devices and emitted modulated blue light by gate biasing. (C) 2014 AIP Publishing LLC.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.6
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

Article Engineering, Electrical & Electronic

Enhancing ON- and OFF-State Performance of Quasi-Vertical GaN Trench MOSFETs on Sapphire With Reduced Interface Charges and a Thick Bottom Dielectric

Renqiang Zhu, Huaxing Jiang, Chak Wah Tang, Kei May Lau

Summary: In this study, the enhancement of ON and OFF-state performance in vertical GaN trench MOSFETs is reported through process optimization. The ON-state performance was improved by reducing MOS channel interface charges with a cleaning process, while the OFF-state performance was enhanced by suppressing the electric field in the gate dielectric near the bottom of the gate trench. High-performance quasi-vertical GaN trench MOSFETs with low specific ON-resistance and high breakdown voltage were demonstrated.

IEEE ELECTRON DEVICE LETTERS (2022)

Article Optics

Full-color micro-display by heterogeneous integration of InGaN blue/green dual-wavelength and AlGaInP red LEDs

Peian Li, Xu Zhang, Longheng Qi, Kei May Lau

Summary: In this study, a full-color micro-display is demonstrated by bonding an InGaN blue/green dual-wavelength LED array and an AlGaInP red LED array. The micro-display, with a high brightness and wide color gamut, shows the potential of a cost-effective and high-performance full-color LED micro-display for virtual reality and augmented reality devices.

OPTICS EXPRESS (2022)

Review Optics

Recent advances in light sources on silicon

Yu Han, Hyundai Park, John Bowers, Kei May Lau

Summary: This article reviews the recent advances in on-chip light sources integrated onto mainstream Si platforms and discusses four different integration technologies. It introduces the basic concepts, focuses on recent progress, and discusses the research challenges and opportunities associated with each technology.

ADVANCES IN OPTICS AND PHOTONICS (2022)

Article Physics, Applied

Vertical GaN trench MOSFETs with step-graded channel doping

Renqiang Zhu, Huaxing Jiang, Chak Wah Tang, Kei May Lau

Summary: This study reports on the use of vertical GaN trench MOSFETs with step-graded channel doping, which achieved a better trade-off between I-ON, R-ON, and V-th compared to conventional devices with uniform channel doping.

APPLIED PHYSICS LETTERS (2022)

Article Engineering, Electrical & Electronic

Telecom InGaAs/InP Quantum Well Lasers Laterally Grown on Silicon-on-Insulator

Jie Li, Ying Xue, Liying Lin, Zengshan Xing, Kam Sing Wong, Kei May Lau

Summary: In this study, we achieved the fabrication of high-quality InGaAs/InP quantum well lasers on commercially available silicon-on-insulator substrates using selective epitaxy, while achieving efficient coupling with Si waveguides with the lateral aspect ratio trapping technique. The experimental results demonstrated low threshold pulsed lasing on the fabricated micro-ring lasers at room temperature, which is a crucial step towards electrically pumped lasers at telecom band as well as fully integrated Si-photonics.

JOURNAL OF LIGHTWAVE TECHNOLOGY (2022)

Article Optics

High-speed and low dark current silicon-waveguide-coupled III-V photodetectors selectively grown on SOI

Ying Xue, Yu Han, Yi Wang, Jie LI, Jingyi Wang, Zunyue Zhang, Xinlun Cai, Hon Ki Tsang, Kei May Lau

Summary: This article demonstrates the seamless integration of high-performance III-V photodetectors on SOI wafers and their intimate coupling with Si waveguides. The integrated devices exhibit low dark current, high photocurrent, large responsivities, and a wide detection wavelength range. High-speed measurements also reveal the capability for fast data communication.

OPTICA (2022)

Article Optics

Monolithically integrated high-resolution full-color GaN-on-Si micro-LED microdisplay

Longheng Qi, Xu Zhang, Wing Cheung Chong, Kei May Lau

Summary: This paper demonstrates a monolithic full-color micro-LED microdisplay with a resolution of 423 pixels per inch by integrating a blue GaN-on-Si display module and a quantum dots photoresist color conversion module. The result is a full-color micro-LED display with a wide color gamut and high brightness. The prototype shows potential scalability and low-cost volume production of high-resolution full-color micro-LED microdisplays.

PHOTONICS RESEARCH (2023)

Article Physics, Applied

GaAs on (001) Si templates for near-infrared InP quantum dot lasers

Jie Huang, Qi Lin, Wei Luo, Liying Lin, Kei May Lau

Summary: The study found that the defect density of GaAs/Si templates could be significantly reduced with optimized thermal cycle annealing and dislocation filter layers, leading to lower surface roughness. Additionally, optically pumped InP quantum dot micro-disk lasers fabricated on these templates exhibited excellent performance with room-temperature continuous-wave lasing and ultra-low lasing thresholds.

JOURNAL OF APPLIED PHYSICS (2022)

Article Physics, Applied

III-V selective regrowth on SOI for telecom lasers in silicon photonics

Jie Li, Ying Xue, Zhao Yan, Yu Han, Kei May Lau

Summary: To achieve fully integrated silicon photonics, reliable III-V light sources that can efficiently couple with Si/SiN waveguides are crucial. A selective regrowth scheme was developed on a monolithic InP/SOI platform to construct on-chip lasers that can be efficiently coupled with Si/SiN waveguides. Strong photoluminescence emission at the telecom band was obtained on both growth templates, demonstrating the potential for multi-wavelength emission on the same chip. The regrowth method provides a promising solution for the monolithic integration of III-V on-chip lasers on Si.

JOURNAL OF APPLIED PHYSICS (2023)

Article Optics

980 nm electrically pumped continuous lasing of QW lasers grown on silicon

Qi Lin, Jie Huang, Liying Lin, Wei Luo, Wen Gu, Kei May Lau

Summary: This article reports on the continuous wave lasing of 980nm electrically pumped quantum well lasers directly grown on silicon, and compares them with lasers grown on other substrates. The results show that although lasers grown on silicon have slightly higher threshold current, it still demonstrates a promising step towards realizing quantum well lasers on silicon.

OPTICS EXPRESS (2023)

Article Optics

High coupling efficiency waveguide grating couplers on lithium niobate

Xuetong Zhou, Ying Xue, Fan Ye, Ziyao Feng, Yuan Li, Xiankai Sun, Kei May Lau, Hon Ki Tsang

Summary: We propose and validate a new approach for high coupling efficiency (CE) grating couplers (GCs) in the lithium niobate on insulator photonic integration platform. Enhanced CE is achieved by increasing the grating strength using a high refractive index polysilicon layer on the GC. The optical cavity formed in the vertical direction enhances the CE of the waveguide GC, and simulations predict a CE of -1.40 dB while the experimentally measured CE is -2.20 dB with a 3-dB bandwidth of 81 nm from 1592 nm to 1673 nm. The high CE GC is achieved without using bottom metal reflectors or requiring the etching of the lithium niobate material.

OPTICS LETTERS (2023)

Article Engineering, Electrical & Electronic

A Fully-Integrated Micro-Display System With Hybrid Voltage Regulator

Junmin Jiang, Xu Zhang, Xun Liu, Zhaojun Liu, Liusheng Sun, Shing Hin Yuen, Wing Cheung Chong, Wing-Hung Ki, C. Patrick Yue, Kei May Lau

Summary: This paper demonstrates a fully-integrated active matrix light-emitting diode (AMLED) micro-display system. The system consists of a 36 x 64 AMLED array chip based on GaN-on-Silicon epilayers and a silicon driving chip integrating an on-chip hybrid voltage regulator, pixel drivers, and peripheral circuits. The system achieves high pixel density and can operate directly with a battery without any external passive components.

IEEE JOURNAL ON EMERGING AND SELECTED TOPICS IN CIRCUITS AND SYSTEMS (2023)

Article Engineering, Electrical & Electronic

Small Vth Shift and Low Dynamic RON in GaN MOSHEMT With ZrO2 Gate Dielectric

Yu Zhang, Yitian Gu, Jiaxiang Chen, Yitai Zhu, Baile Chen, Huaxing Jiang, Kei May Lau, Xinbo Zou

Summary: The OFF-state stress-induced threshold voltage instability and dynamic ON-resistance of GaN MOSHEMT with ZrO2 gate dielectric are investigated. Electron emission at the ZrO2/AlGaN interface is found to cause the threshold voltage shift. The activation energies of emission and capture are extracted by threshold voltage transient spectroscopy. Under OFF-state drain-source bias stressing, the drain current decreases despite the negative shift of threshold voltage, which is related to electron capture in the access region. The results suggest that high-quality ZrO2 is an attractive option for the gate dielectric of GaN MOSHEMTs in power switching electronics.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2023)

Article Optics

Monolithic full-color active-matrix micro-LED micro-display using InGaN/AlGaInP heterogeneous integration

Longheng Qi, Peian Li, Xu Zhang, Ka Ming Wong, Kei May Lau

Summary: A prototype of full-color micro-LED micro-display with a pixel density of 391 ppi is demonstrated using InGaN/AlGaInP heterogeneous integration. This display shows the feasibility and prospects of high brightness, good color performance, and high-resolution micro-LED micro-displays in future metaverse applications.

LIGHT-SCIENCE & APPLICATIONS (2023)

Article Engineering, Electrical & Electronic

Dynamic Characteristics of GaN MISHEMT With 5-nm In-Situ SiNx Dielectric Layer

Yu Zhang, Lihua Xu, Yitian Gu, Haowen Guo, Huaxing Jiang, Kei May Lau, Xinbo Zou

Summary: This comprehensive study focuses on the dynamic characteristics of GaN MISHEMT with a 5nm-thick in-situ SiNx dielectric. The study examines the effects of both negative and positive gate bias on threshold voltage instability and finds a slight shift in threshold voltage associated with traps at the insulator/AlGaN interface and in the dielectric layer. Pulsed I-V measurements reveal small current collapse and low enhancement of dynamic R-on for zero quiescent drain bias, with an increased dynamic R-on/static R-on ratio identified at a drain quiescent bias of 20V. The study also observes additional current collapse in hard switching-on operation, caused by energetic hot electrons accelerated by drain-source electrical field during the off-to-on step. In summary, the use of a 5nm thin in-situ SiNX layer in GaN MISHEMT results in stabilized threshold voltage, a low dynamic R-on/static R-on ratio, and suppressed current collapse.

IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY (2022)

No Data Available