Influence of substrate heating on hole geometry and spatter area in femtosecond laser drilling of silicon

Refining femtosecond laser induced periodical surface structures with liquid assist

(2012) L.S. Jiao et al.   APPLIED SURFACE SCIENCE

Temperature dependent ablation threshold in silicon using ultrashort laser pulses

(2012) Jostein Thorstensen et al.   JOURNAL OF APPLIED PHYSICS

Role of volatile liquids in debris and hole taper angle reduction during femtosecond laser drilling of silicon

(2011) L. S. Jiao et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Silicon substrate temperature effects on surface roughness induced by ultrafast laser processing

(2011) J.S. Yahng et al.   OPTICS AND LASERS IN ENGINEERING

The influence of substrate temperature on femtosecond laser micro-processing of silicon, stainless steel and glass

(2009) J.S. Yahng et al.   OPTICS AND LASERS IN ENGINEERING

Femtosecond laser micromachining in transparent materials

(2008) Rafael R. Gattass et al.   Nature Photonics

Micro and nano-structuration of silicon by femtosecond laser: Application to silicon photovoltaic cells fabrication

(2007) M. Halbwax et al.   THIN SOLID FILMS