Femtosecond laser surface structuring of silicon using optical vortex beams generated by a q-plate
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Title
Femtosecond laser surface structuring of silicon using optical vortex beams generated by a q-plate
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 104, Issue 24, Pages 241604
Publisher
AIP Publishing
Online
2014-06-18
DOI
10.1063/1.4884116
References
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Related references
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