Excellent c-Si surface passivation by low-temperature atomic layer deposited titanium oxide

Title
Excellent c-Si surface passivation by low-temperature atomic layer deposited titanium oxide
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 104, Issue 25, Pages 253903
Publisher
AIP Publishing
Online
2014-06-26
DOI
10.1063/1.4885096

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