A non-destructive method for measuring the mechanical properties of ultrathin films prepared by atomic layer deposition

Ultrathin Multifunctional Oxide Coatings for Lithium Ion Batteries

(2011) Xingcheng Xiao et al.   ADVANCED MATERIALS

Oxygen deficiency defects in amorphous Al2O3

(2010) T. V. Perevalov et al.   JOURNAL OF APPLIED PHYSICS

Thickness effects on the lithiation of amorphous silicon thin films

(2010) Sumit K. Soni et al.   SCRIPTA MATERIALIA

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Atomic Layer Deposition of Platinum Nanoparticles on Carbon Nanotubes for Application in Proton-Exchange Membrane Fuel Cells

(2009) Chueh Liu et al.   Small

Nanoindentation Investigation of HfO[sub 2] and Al[sub 2]O[sub 3] Films Grown by Atomic Layer Deposition

(2008) K. Tapily et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Ultralow Loading Pt Nanocatalysts Prepared by Atomic Layer Deposition on Carbon Aerogels

(2008) Jeffrey S. King et al.   NANO LETTERS