High quality factor nanocrystalline diamond micromechanical resonators limited by thermoelastic damping

Title
High quality factor nanocrystalline diamond micromechanical resonators limited by thermoelastic damping
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 104, Issue 15, Pages 151903
Publisher
AIP Publishing
Online
2014-04-17
DOI
10.1063/1.4871803

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