Improved electrical properties of Ge metal-oxide-semiconductor devices with HfO2 gate dielectrics using an ultrathin GeSnOx film as the surface passivation layer

Title
Improved electrical properties of Ge metal-oxide-semiconductor devices with HfO2 gate dielectrics using an ultrathin GeSnOx film as the surface passivation layer
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 102, Issue 14, Pages 142906
Publisher
AIP Publishing
Online
2013-04-11
DOI
10.1063/1.4800228

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