Direct measurements and numerical simulations of gas charging in microelectromechanical system capacitive switches

Published 2012 View Full Article

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Title
Direct measurements and numerical simulations of gas charging in microelectromechanical system capacitive switches
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 100, Issue 8, Pages 083503
Publisher
AIP Publishing
Online
2012-02-23
DOI
10.1063/1.3688176
References
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