Low leakage current in metal-insulator-metal capacitors of structural Al2O3/TiO2/Al2O3 dielectrics

Published 2012 View Full Article

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Title
Low leakage current in metal-insulator-metal capacitors of structural Al2O3/TiO2/Al2O3 dielectrics
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 100, Issue 8, Pages 081101
Publisher
AIP Publishing
Online
2012-02-22
DOI
10.1063/1.3687702
References
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