Presence and origin of interface charges at atomic-layer deposited Al2O3/III-nitride heterojunctions

Title
Presence and origin of interface charges at atomic-layer deposited Al2O3/III-nitride heterojunctions
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 99, Issue 19, Pages 193504
Publisher
AIP Publishing
Online
2011-11-10
DOI
10.1063/1.3658450

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