Formation of a semi-insulating layer in n-type 4H-SiC by electron irradiation

Published 2011 View Full Article

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Title
Formation of a semi-insulating layer in n-type 4H-SiC by electron irradiation
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 98, Issue 26, Pages 262106
Publisher
AIP Publishing
Online
2011-07-01
DOI
10.1063/1.3604795
References
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