Very low effective Schottky barrier height for erbium disilicide contacts on n-Si through arsenic segregation

Title
Very low effective Schottky barrier height for erbium disilicide contacts on n-Si through arsenic segregation
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 99, Issue 1, Pages 012110
Publisher
AIP Publishing
Online
2011-07-08
DOI
10.1063/1.3608159

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