Triaxial stress distributions in Cu/low-k interconnect features

Published 2011 View Full Article

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Title
Triaxial stress distributions in Cu/low-k interconnect features
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 98, Issue 6, Pages 061908
Publisher
AIP Publishing
Online
2011-02-10
DOI
10.1063/1.3549876
References
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