Journal
APPLIED PHYSICS LETTERS
Volume 98, Issue 12, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3571292
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By introducing some ideas of magnetohydrodynamics (MHD) and kinetic theories, some useful solutions for electron-density distribution in the radial direction in multicusp ion source are obtained. Therefore, some conclusions are made in this perspective: 1, the electron-density distributions in a specific region in the sheath are the same with or without magnetic field; 2, the influence of magnetic field on the electron density obeys exponential law, which should take into account the collision term as well if the magnetic field is strong; 3, the result derived from the Boltzmann equation is qualitatively consistent with some given experimental results. (C) 2011 American Institute of Physics. [doi:10.1063/1.3571292]
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