Bond-specific reaction kinetics during the oxidation of (111) Si: Effect of n-type doping

Published 2011 View Full Article

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Title
Bond-specific reaction kinetics during the oxidation of (111) Si: Effect of n-type doping
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 98, Issue 2, Pages 021904
Publisher
AIP Publishing
Online
2011-01-12
DOI
10.1063/1.3537809
References
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