Journal
APPLIED PHYSICS LETTERS
Volume 99, Issue 21, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3663539
Keywords
aluminium compounds; carrier relaxation time; coplanar waveguides; epitaxial growth; Josephson effect; magnesium compounds; niobium compounds; photolithography; sputter etching; superconducting junction devices
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Funding
- FIRST
- MEXT KAKENHI
- NICT
- Grants-in-Aid for Scientific Research [21102002] Funding Source: KAKEN
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We demonstrate superconducting qubits using epitaxially grown Josephson junctions. A fully epitaxial NbN/AlN/NbN trilayer on MgO (100) substrate is processed by photolithography and dry-etching into transmon qubits with a large Josephson energy. The tunnel barrier made of cubic-phase AlN, rather than the ordinary hexagonal phase, is the key to avoid piezoelectric coupling to the phonon bath. The energy-relaxation time and the spin-echo decay time of similar to 500 ns are observed in the qubits that are coupled to a monolithically made coplanar waveguide resonator. (C) 2011 American Institute of Physics. [doi:10.1063/1.3663539]
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