Journal
APPLIED PHYSICS LETTERS
Volume 98, Issue 7, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3553229
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Funding
- National Basic Research Program (973) of China [2011CB301903]
- National 863 Project of China [2006AA03A129]
- Foundation of the Key Technologies R&D Program of Guangdong Province [2007A010501007, 2007A010500011]
- National Science Foundation of China-Guangdong Province Joint Foundation [U0834001]
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In this letter, a method of using selective area growth (SAG) technique was proposed to fabricate the enhancement-mode (E-mode) AlGaN/-GaN heterostructure field effect transistors (HFETs), which can effectively avoid the plasma treatment damage to the active region of HFETs in comparison with the conventional methods. The SAG-HFETs exhibited a good performance of the maximum drain current of 300 mA/-mm and peak transconductance of 135 mS/-mm with a larger positive threshold voltage of 0.4 V. The results indicate that the SAG technique is a promising method to realize the high performance E-mode GaN based HFETs. (C) 2011 American Institute of Physics. [doi:10.1063/-1.3553229]
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