Journal
APPLIED PHYSICS LETTERS
Volume 97, Issue 23, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3526383
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Funding
- MEXT (Ministry of Education, Culture, Science and Technology, Japan)
- Utsunomiya University
- Research Foundation for Opto-Science and Technology
- Science Foundation Ireland [07/IN.1/B1771]
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We have investigated the dependence of the spectral behavior and conversion efficiencies of rare-earth plasma extreme ultraviolet sources with peak emission at 6.7 nm on laser wavelength and the initial target density. The maximum conversion efficiency was 1.3% at a laser intensity of 1.6 x 10(12) W/cm(2) at an operating wavelength of 1064 nm, when self-absorption was reduced by use of a low initial density target. Moreover, the lower-density results in a narrower spectrum and therefore improved spectral purity. It is shown to be important to use a low initial density target and/or to produce low electron density plasmas for efficient extreme ultraviolet sources when using high-Z targets. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3526383]
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