Removal of near-interface traps at SiO2/4H–SiC (0001) interfaces by phosphorus incorporation

Published 2010 View Full Article

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Title
Removal of near-interface traps at SiO2/4H–SiC (0001) interfaces by phosphorus incorporation
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 96, Issue 20, Pages 203508
Publisher
AIP Publishing
Online
2010-05-22
DOI
10.1063/1.3432404

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