Surface tension-driven chip self-assembly with load-free hydrogen fluoride-assisted direct bonding at room temperature for three-dimensional integrated circuits

Title
Surface tension-driven chip self-assembly with load-free hydrogen fluoride-assisted direct bonding at room temperature for three-dimensional integrated circuits
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 96, Issue 15, Pages 154105
Publisher
AIP Publishing
Online
2010-04-17
DOI
10.1063/1.3328098

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