Improved electrical properties of Ge metal-oxide-semiconductor capacitors with high-k HfO2 gate dielectric by using La2O3 interlayer sputtered with/without N2 ambient

Title
Improved electrical properties of Ge metal-oxide-semiconductor capacitors with high-k HfO2 gate dielectric by using La2O3 interlayer sputtered with/without N2 ambient
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 97, Issue 2, Pages 022903
Publisher
AIP Publishing
Online
2010-07-14
DOI
10.1063/1.3462301

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