Tunable thin film bulk acoustic wave resonators with improved Q-factor

Published 2010 View Full Article

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Title
Tunable thin film bulk acoustic wave resonators with improved Q-factor
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 96, Issue 21, Pages 212904
Publisher
AIP Publishing
Online
2010-06-01
DOI
10.1063/1.3441413
References
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