Hydrogen in plasma-nanofabrication: Selective control of nanostructure heating and passivation

Title
Hydrogen in plasma-nanofabrication: Selective control of nanostructure heating and passivation
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 96, Issue 13, Pages 133105
Publisher
AIP Publishing
Online
2010-03-30
DOI
10.1063/1.3374324

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