Reactive nitrogen source based on ECR discharge sustained by 24 GHz radiation

Published 2015 View Full Article

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Title
Reactive nitrogen source based on ECR discharge sustained by 24 GHz radiation
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 54, Issue 4, Pages 040302
Publisher
Japan Society of Applied Physics
Online
2015-03-10
DOI
10.7567/jjap.54.040302

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