Journal
APPLIED PHYSICS LETTERS
Volume 95, Issue 18, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3258654
Keywords
bifurcation; micromechanical resonators; topology
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We report the experimental observation of a four-bifurcation-point (or five possible amplitudes for a given frequency) behavior of electrostatically actuated micromechanical resonators, called the mixed (first hardening then softening) behavior. We also demonstrate both analytically and experimentally tuning the bifurcation topology of this behavior via an electrostatic mechanism. An analytical model allows for the qualitative as well as quantitative explanation of the experiments and serves as a simple tool for design of nonlinear micromechanical devices under high drive.
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