Scaling characteristics of depletion type, fully transparent amorphous indium–gallium–zinc-oxide thin-film transistors and inverters following Ar plasma treatment

Title
Scaling characteristics of depletion type, fully transparent amorphous indium–gallium–zinc-oxide thin-film transistors and inverters following Ar plasma treatment
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 54, Issue 11, Pages 114102
Publisher
Japan Society of Applied Physics
Online
2015-10-14
DOI
10.7567/jjap.54.114102

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