Orientation-controlled Si thin films on insulating substrates by Al-induced crystallization combined with interfacial-oxide layer modulation

Published 2009 View Full Article

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Title
Orientation-controlled Si thin films on insulating substrates by Al-induced crystallization combined with interfacial-oxide layer modulation
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 95, Issue 13, Pages 132103
Publisher
AIP Publishing
Online
2009-09-30
DOI
10.1063/1.3241076
References
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