Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 14, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3114403
Keywords
aluminium; bismuth compounds; elemental semiconductors; ferroelectric capacitors; ferroelectric storage; leakage currents; MIS capacitors; MISFET; random-access storage; silicon; yttrium compounds
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Funding
- National Science Council of Taiwan, Republic of China [NSC96-2221-E-007-160]
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Metal-ferroelectric-insulator-semiconductor capacitors and field effect transistors with Al/BiFeO3/Y2O3/Si structure were fabricated and characterized for nonvolatile memory applications. The capacitance-voltage curves exhibit a maximum clockwise memory window of 0.92 V. The minimum leakage current density is 2x10(-7) A/cm(2) at an applied voltage of 5 V. The capacitance-voltage memory window as a function of the sweep voltage range was investigated. The I-DS-V-GS curves of metal-ferroelectric-insulator-semiconductor transistors show a maximum memory window of 0.84 V. The drain current on/off ratio maintained more than three orders of magnitude after an elapsed time of 10(4) s.
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