Electronic and structural properties of molybdenum thin films as determined by real-time spectroscopic ellipsometry

Published 2009 View Full Article

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Title
Electronic and structural properties of molybdenum thin films as determined by real-time spectroscopic ellipsometry
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 14, Pages 141908
Publisher
AIP Publishing
Online
2009-04-09
DOI
10.1063/1.3117222
References
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