Improved silicon surface passivation achieved by negatively charged silicon nitride films

Published 2009 View Full Article

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Title
Improved silicon surface passivation achieved by negatively charged silicon nitride films
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 6, Pages 063509
Publisher
AIP Publishing
Online
2009-02-12
DOI
10.1063/1.3077157

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