Terahertz vacuum electronic circuits fabricated by UV lithographic molding and deep reactive ion etching

Published 2009 View Full Article

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Title
Terahertz vacuum electronic circuits fabricated by UV lithographic molding and deep reactive ion etching
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 95, Issue 18, Pages 181505
Publisher
AIP Publishing
Online
2009-11-07
DOI
10.1063/1.3259823
References
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