Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 9, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3093528
Keywords
acoustic wave propagation; aluminium compounds; diamond; elemental semiconductors; III-V semiconductors; interdigital transducers; surface acoustic wave devices; wide band gap semiconductors
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In this research, shear horizontal (SH) surface acoustic wave (SAW) modes of interdigital transducer (IDT)/(100) AlN/(111) diamond propagated along the y-axis were theoretically analyzed and they exhibited excellent SH SAW properties. This is special for mode 0 where the K-2 curve shows a maximum value (1.27%) at h/lambda=0.28 and the velocity is 7496 m/s. The research results provide a predictable and theoretical basis for further application on high velocity SH SAW devices.
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