Laser-direct photoetching of metal thin film for the electrode of transistor

Published 2009 View Full Article

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Title
Laser-direct photoetching of metal thin film for the electrode of transistor
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 95, Issue 7, Pages 071104
Publisher
AIP Publishing
Online
2009-08-19
DOI
10.1063/1.3207823
References
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