Enhanced resolution and high aspect-ratio semiconductor nanopatterning by metal overcoating

Published 2009 View Full Article

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Title
Enhanced resolution and high aspect-ratio semiconductor nanopatterning by metal overcoating
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 6, Pages 063103
Publisher
AIP Publishing
Online
2009-02-10
DOI
10.1063/1.3080207
References
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