Effect of doping on the amorphous to microcrystalline transition in a hydrogenated amorphous silicon under hydrogen plasma treatment

Published 2009 View Full Article

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Title
Effect of doping on the amorphous to microcrystalline transition in a hydrogenated amorphous silicon under hydrogen plasma treatment
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 6, Pages 061909
Publisher
AIP Publishing
Online
2009-02-12
DOI
10.1063/1.3080661
References
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