Effect of metal contacts on the electrical characteristics of Al2O3 dielectric thin films

Published 2008 View Full Article

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Title
Effect of metal contacts on the electrical characteristics of Al2O3 dielectric thin films
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 92, Issue 12, Pages 122911
Publisher
AIP Publishing
Online
2008-03-28
DOI
10.1063/1.2903708

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