Quantitative coherent diffractive imaging of an integrated circuit at a spatial resolution of 20 nm

Published 2008 View Full Article

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Title
Quantitative coherent diffractive imaging of an integrated circuit at a spatial resolution of 20 nm
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 93, Issue 21, Pages 214101
Publisher
AIP Publishing
Online
2008-11-25
DOI
10.1063/1.3025819
References
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