Thermal decomposition products in arc evaporated TiAlN/TiN multilayers

Published 2008 View Full Article

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Title
Thermal decomposition products in arc evaporated TiAlN/TiN multilayers
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 93, Issue 14, Pages 143110
Publisher
AIP Publishing
Online
2008-10-12
DOI
10.1063/1.2998588
References
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