Low specific contact resistance of heavily phosphorus-doped diamond film

Published 2008 View Full Article

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Title
Low specific contact resistance of heavily phosphorus-doped diamond film
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 93, Issue 20, Pages 202103
Publisher
AIP Publishing
Online
2008-11-19
DOI
10.1063/1.3005639
References
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