Fabrication process for pillar GeTe/Sb2Te3superlattice topological-switching random access memory

Published 2015 View Full Article

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Title
Fabrication process for pillar GeTe/Sb2Te3superlattice topological-switching random access memory
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 54, Issue 5S, Pages 05ED01
Publisher
Japan Society of Applied Physics
Online
2015-04-07
DOI
10.7567/jjap.54.05ed01

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