Modulating effects of the low-frequency source on ion energy distributions in a dual frequency capacitively coupled plasma

Published 2008 View Full Article

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Title
Modulating effects of the low-frequency source on ion energy distributions in a dual frequency capacitively coupled plasma
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 93, Issue 3, Pages 031504
Publisher
AIP Publishing
Online
2008-07-25
DOI
10.1063/1.2945890

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