Enhancing electron transport in Si:P delta-doped devices by rapid thermal anneal

Title
Enhancing electron transport in Si:P delta-doped devices by rapid thermal anneal
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 93, Issue 14, Pages 142105
Publisher
AIP Publishing
Online
2008-10-12
DOI
10.1063/1.2996582

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