Bandgap engineering of tunnel oxide with multistacked layers of Al2O3/HfO2/SiO2 for Au-nanocrystal memory application

Published 2008 View Full Article

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Title
Bandgap engineering of tunnel oxide with multistacked layers of Al2O3/HfO2/SiO2 for Au-nanocrystal memory application
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 93, Issue 13, Pages 132907
Publisher
AIP Publishing
Online
2008-10-07
DOI
10.1063/1.2995862

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