Plastic complementary microelectromechanical switches

We have fabricated plastic complementary microelectromechanical switches by using ink-jet printing technologies. Two vertically stacked regular plastic microelectromechanical switches that are complementary to each other realize the function of an inverter. While rectangular voltage waveforms were periodically applied to the control electrodes in the air, the delay times and durability were examined systematically. The frequency response was 50 Hz for an operation voltage of 60 V. When the number of periodic cycles exceeded 10(6), the changes in the on resistance of the top and bottom switches were 9% and 43%, respectively. (C) 2008 American Institute of Physics.