Effects of nitrogen atom doping on optical properties and dielectric constant of HfO2 gate oxides

Published 2008 View Full Article

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Title
Effects of nitrogen atom doping on optical properties and dielectric constant of HfO2 gate oxides
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 92, Issue 20, Pages 202906
Publisher
AIP Publishing
Online
2008-05-24
DOI
10.1063/1.2936309
References
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