Electrical characterization of CeO2∕Si interface properties of metal-oxide-semiconductor field-effect transistors with CeO2 gate dielectric

Title
Electrical characterization of CeO2∕Si interface properties of metal-oxide-semiconductor field-effect transistors with CeO2 gate dielectric
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 92, Issue 4, Pages 043507
Publisher
AIP Publishing
Online
2008-01-31
DOI
10.1063/1.2838746

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